May 9, 2023- Recently, Zhongwei Semiconductor Equipment (Shanghai) Co., Ltd. (hereinafter referred to as "Zhongwei Company") launched its self-developed 12 inch low-pressure chemical vapor deposition (LPCVD) device Preforma Uniflex ™ CW. This is a new breakthrough made by Zhongwei Company in the field of semiconductor thin film deposition after years of deep cultivation in high-end micro processing equipment, and also a new driving force for achieving diversified business growth.
Image annotation: Zhongwei Company's 12 inch low-pressure chemical vapor deposition product Preforma Uniflex ™ CW
As a 12 inch LPCVD device with high output efficiency and excellent performance independently developed by Zhongwei Company, Preforma Uniflex ™ CW can flexibly configure up to five dual reaction chambers (ten reaction chambers), each of which can process two wafers simultaneously, ensuring lower production costs and chemical consumption while achieving higher production efficiency.
Preforma Uniflex ™ CW, as an LPCVD device independently developed by Zhongwei Company, is equipped with an optimized gas mixing scheme and heating table that fully possesses independent intellectual property rights. It has excellent film uniformity, filling ability, and process adjustment flexibility. For wafers with large bending, it also has good process processing capabilities. And its excellent ladder coverage and filling ability can meet the filling application requirements of advanced logic devices, contact holes in DRAM and 3D NAND, as well as metal tungsten wires.
Continuously exploring and innovating. Preforma Uniflex launched by China Microelectronics Corporation ™ CW is another milestone on the company's path to innovation. All along, Zhongwei Company has adhered to the corporate culture of the "Four Ten", and has always integrated the ten principles of product development into the entire process of product development, design, and manufacturing. The R&D team adheres to the concept of developing to achieve high equipment performance and strict customer requirements, and adheres to technological innovation, equipment differentiation, and intellectual property protection. "This LPCVD device not only has complete and independent intellectual property rights, but also creates a new record of the speed of new equipment research and development of Microenterprise." Vice President of Microenterprise Corporate group Group Tao Heng, General Manager of LPCVD Product Department and Public Platform Engineering Department, said, "Since the development of this LPCVD device was approved, we have completed product design, production prototype development, and laboratory evaluation in less than half a year. Currently, we have successfully imported it into the client for production line approval
Nowadays, the digital industry has become one of the two pillars of the national economy and is completely changing the way humans produce and live. Dr. Yin Zhiyao, Chairman and General Manager of Zhongwei Company, stated that, A strong digital means a strong country; a weak digital means a weak country. Semiconductor micro processing equipment is the cornerstone of the digital industry and the key to the development of integrated circuits and digital industries. To do a good job, one must first make use of its tools. Equipment for processing micro and nanoscale micro devices is crucial for the development of the integrated circuits and micro device industry and the promotion of the digital industry. This time, we are launching a new LPCVD product, which focuses on plasma etching equipment and MOCVD equipment On this basis, the company has further expanded its product line layout and enhanced the autonomy and controllability of semiconductor equipment. In the future, the company will continue to aim at the forefront of world technology, adhere to the three-dimensional development strategy, and launch more self-designed semiconductor devices to contribute to the development of the digital industry
Since its establishment in 2004, Zhongwei Company has been committed to developing and providing high-end micro processing equipment with international competitiveness, and has now developed into one of the leading enterprises in high-end micro processing equipment in China. In the future, the company will continue to create more internationally competitive technological innovation and differentiated products, providing customers and the market with superior performance, high production efficiency, and cost-effective equipment solutions.
